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Home › Photoluminescence imaging with preferential detection of photoluminescence signals emitted from a specified material layer of a wafer or other workpiece

Photoluminescence imaging with preferential detection of photoluminescence signals emitted from a specified material layer of a wafer or other workpiece

US Patent 7504642 · Granted Mar 17, 2009

Estimated economic value: $468,000 ⓘ

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