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Home › Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece

Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece

US Patent 7446321 · Granted Nov 4, 2008

Estimated economic value: $211,000 ⓘ

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