Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of measuring sub-micron trench structures

Method of measuring sub-micron trench structures

US Patent 7499183 · Granted Mar 3, 2009

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for quality control of a periodic structure2019
Method of measuring deep trenches with model-based optical spectroscopy2010
Method of determining properties of patterned thin film metal structures using t2008
Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces a2008
Method and device for simultaneously measuring the thickness of multiple thin me2000