Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241058 | Systems and methods for quality control of a periodic structure | Keith A. Nelson, Abdelhak Bensaoula, Jateen S. Gandhi, Donna Washington Stokes, Rebecca Lynne Forrest +1 more | 2019-03-26 |
| 7839509 | Method of measuring deep trenches with model-based optical spectroscopy | Peter Rosenthal, Carlos Alberto Duran, Alexander Mazurenko | 2010-11-23 |
| 7499183 | Method of measuring sub-micron trench structures | — | 2009-03-03 |
| 7365864 | Method of determining properties of patterned thin film metal structures using transient thermal response | Michael Gostein | 2008-04-29 |
| 7327468 | Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin films | Zhuoyun Li, Alexander Mazurenko | 2008-02-05 |
| 6069703 | Method and device for simultaneously measuring the thickness of multiple thin metal films in a multilayer structure | Matthew Banet, Martin Fuchs, John A. Rogers, Keith A. Nelson, Timothy F. Crimmins | 2000-05-30 |