Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged particle beam irradiation method and charged particle beam apparatus

Charged particle beam irradiation method and charged particle beam apparatus

US Patent 7488961 · Granted Feb 10, 2009

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of manufacturing emitter, emitter, and focused ion beam apparatus2021
Method for acquiring image and ion beam apparatus2019
Method for acquiring image and ion beam apparatus2018
Focused ion beam apparatus2017
Charged particle beam apparatus and processing method2017
Charged particle beam apparatus and processing method2017
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, 2017
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, 2017
Repair apparatus2016
Focused ion beam apparatus with precious metal emitter surface2016
Focused ion beam system2016
Method for fabricating emitter2015