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Home › Electrical open/short contact alignment structure for active region vs. gate region

Electrical open/short contact alignment structure for active region vs. gate region

US Patent 7453272 · Granted Nov 18, 2008

Estimated economic value: $4,805,000 ⓘ

Assignee

IBM

Inventors

Richard Lee Donze (12 patents)
Karl R. Erickson (80 patents)
William Paul Hovis (100 patents)
John E. Sheets, II (151 patents)
Jon Robert Tetzloff (11 patents)

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