Semiconductor wafer baking apparatus

Assignee

• Samsung

Inventors

• Jin-Sung Lee (83 patents)
• Dong Woo Lee (137 patents)
• Tae Gyu Kim (106 patents)
• Tae Sang Park (49 patents)
• Bang-weon Lee (9 patents)
• Jong-Kill Lim (6 patents)
• Chang-hoon Jung (12 patents)
• Sang-kwon Wee (7 patents)

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