Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Integrated microstructure sensor element for detecting thermodynamic variables of a fluid

Integrated microstructure sensor element for detecting thermodynamic variables of a fluid

US Patent 7362105 · Granted Apr 22, 2008

Estimated economic value: $2,662,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for producing damper structures on a micromechanical wafer2024
Method for producing a micromechanical device having a damper structure2022
Method for producing damper structures on a micromechanical wafer2022
Method and device for determining an injection process of an injection appliance2020
MEMS component including a diaphragm element which is attached via a spring stru2018
MEMS component2018
MEMS component including a sound-pressure-sensitive diaphragm element and piezos2018
MEMS component including a sound-pressure-sensitive diaphragm element2018
Micromechanical sound transducer system and a corresponding manufacturing method2017
Method for producing silicon microneedle arrays with holes and microneedle array2017
Method for active hybridization in microarrays with denaturing function2017
Microneedle array applicator and method for applying a microneedle array2016