Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines

Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines

US Patent 7361234 · Granted Apr 22, 2008

Estimated economic value: $3,044,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for adjusting surface topography of a substrate support apparatus2024
Methods and apparatus for adjusting surface topography of a substrate support ap2022
Robot centered augmented reality system2022
Overlay mark and application thereof2015
Methods of lithographically patterning a substrate2014
Systems and methods for implementing and manufacturing reticles for use in photo2013
Semiconductor wafer alignment markers, and associated systems and methods2013
Methods of lithographically patterning a substrate2012
Method of reducing photoresist defects during fabrication of a semiconductor dev2012
Methods of patterning positive photoresist2012
Systems and methods for implementing and manufacturing reticles for use in photo2011
Method and apparatus for a two-step resist soft bake to prevent ILD outgassing d2010