Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Qualification of a mask

Qualification of a mask

US Patent 7330249 · Granted Feb 12, 2008

Estimated economic value: $31,292,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and methods of generating comparable regions of a lithographic mask2022
Closed-loop automatic defect inspection and classification2021
Closed-loop automatic defect inspection and classification2018
Integration of automatic and manual defect classification2018
Optimization of unknown defect rejection for automatic defect classification2017
Method and system for aerial imaging of a reticle2012
Inspection of EUV masks by a DUV mask inspection tool2012
Method and system for evaluating a variation in a parameter of a pattern2012
Method and system for evaluating an evaluated pattern of a mask2012
Method and system for evaluating an evaluated pattern of a mask2012
High throughput across-wafer-variation mapping2011
Alternating phase-shift mask inspection method and apparatus2006