Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for forming silicon-containing film and method for decreasing number of particles

Method for forming silicon-containing film and method for decreasing number of particles

US Patent 7329591 · Granted Feb 12, 2008

Estimated economic value: $2,912,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optimized proximity profile for strained source/drain feature and method of fabr2025
Multi-layered resistor with a tight temperature coefficient of resistance tolera2025
Striking practice device2024
Epitaxial source/drain structure and method2024
Apparatus and method of manufacturing interconnect structures2024
Pulse-width modulation signal observation circuit and hardware-in-the-loop simul2024
Semiconductor device and method of manufacture2024
Merged source/drain features2024
Multi-layered resistor with a tight temperature coefficient of resistance tolera2024
Optimized proximity profile for strained source/drain feature and method of fabr2023
Epitaxial source/drain structure and method2023
Motor parameter estimation device and method2023