Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Zeolite-carbon doped oxide composite low k dielectric

Zeolite-carbon doped oxide composite low k dielectric

US Patent 7303985 · Granted Dec 4, 2007

Estimated economic value: $21,616,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Highly sequenced copolymer for dual-tone photoresists, resist composition and pa2025
Forming semiconductor structures2013
Methods and compositions for reducing line wide roughness2011
Methods and compositions for reducing line wide roughness2011
Image capturing apparatus with pop-up flash structure2010
Camera with external flash unit2010
Zeolite—sol gel nano-composite low k dielectric2010
Brush for cleaning wafer2008
Immersion liquids with siloxane polymer for immersion lithography2008
Immersion liquids with siloxane polymer for immersion lithography2008
Wash composition with polymeric surfactant2007
Method for forming an opening for an interconnect structure in a dielectric laye2006