Insulating substrate, manufacturing method thereof, and module semiconductor device with insulating substrate

Assignee

• Kabushiki Kaisha Toshiba

Inventors

• Yutaka Ishiwata (13 patents)
• Kosoku Nagata (2 patents)
• Toshio Shimizu (68 patents)
• Hiroyuki Hiramoto (4 patents)
• Yasuhiko Taniguchi (3 patents)
• Kouji Araki (8 patents)
• Hiroshi Fukuyoshi (5 patents)
• Hiroshi Komorita (19 patents)

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