Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot size

Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot size

US Patent 7248364 · Granted Jul 24, 2007

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for high throughput analysis of conformation in biological e2019
Systems and methods for high throughput analysis of conformation in biological e2018
Combined transmittance and angle selective scattering measurement of fluid suspe2011
Automated spatial flipping apparatus and system for photomasks and photomasks wi2011
Compact multiple diameters wafer handling system with on-chuck wafer calibration2010
System and method for optical photomask inspection through pellicle2010
Disc clamping device for multiple standard discs2009
Integrated local and global optical metrology for samples having miniature featu2008
Apparatus and method for examining a disk-shaped sample on an X-Y-theta stage2008
System and method for high intensity small spot optical metrology2008
System and method for high intensity small spot optical metrology2008
Spectrophotometric system with reduced angle of incidence2008