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Home › Method chemical-mechanical polishing and planarizing corundum, GaAs, GaP and GaAs/GaP alloy surfaces

Method chemical-mechanical polishing and planarizing corundum, GaAs, GaP and GaAs/GaP alloy surfaces

US Patent 7223156 · Granted May 29, 2007

Estimated economic value: $5,594,000 ⓘ

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