Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer handler method and system

Wafer handler method and system

US Patent 7214027 · Granted May 8, 2007

Estimated economic value: $38,469,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System for semiconductor wafer retention and sensing in a vacuum load lock2020
Electrostatic chuck shielding mechanism2017
In-vacuum high speed pre-chill and post-heat stations2016
Automated robot alignment system and method using kinematic pins and end effecto2007