Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Prevention of robot damage via capacitive sensor assembly

Prevention of robot damage via capacitive sensor assembly

US Patent 7187184 · Granted Mar 6, 2007

Estimated economic value: $5,581,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wafer cleaning2017
Prevention of robot damage via capacitive sensor assembly2005
Prevention of robot damage via capacitive sensor assembly2005
Prevention of robot damage via capacitive sensor assembly2005
Chamber wafer detection2005
Wafer cassette equipped with piezoelectric sensors2004