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Home › Physical nano-machining with a scanning probe system for integrated circuit modification

Physical nano-machining with a scanning probe system for integrated circuit modification

US Patent 7183122 · Granted Feb 27, 2007

Estimated economic value: $10,067,000 ⓘ

Assignee

Intel

Inventors

Michael DiBattista (10 patents)
Richard H. Livengood (32 patents)
Elizabeth B. Varner (1 patents)
Randall C. White (1 patents)

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