Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for characterization of photoresist resolution, and method of use

Apparatus for characterization of photoresist resolution, and method of use

US Patent 7179571 · Granted Feb 20, 2007

Estimated economic value: $6,976,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cavity enhanced absorption spectroscopy using a piecewise tunable laser and hier2025
Clutter avoidance in wide-band cavity ring-down data acquisition2023
Multifunctional polymers2022
Cavity enhanced absorption spectroscopy using a piecewise tunable laser and hier2021
Cavity ring-down spectroscopy having interleaved data acquisition for interferen2021
Fabricating electrically nonconductive blocks using a polymer brush and a sequen2020
Negative-tone resist compositions and multifunctional polymers therein2019
Spectroscopic quantification of extremely rare molecular species in the presence2017
Ring-down binning in FSR hopping mode2016
Regular, stable optical frequency scale for cavity enhanced optical spectroscopy2015
Methods of directed self-assembly and layered structures formed therefrom2014
Methods of directed self-assembly and layered structures formed therefrom2014