Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Reduction Smith-Talbot interferometer prism for micropatterning

Reduction Smith-Talbot interferometer prism for micropatterning

US Patent 7170588 · Granted Jan 30, 2007

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of photolithography using a fluid and a system thereof2014
Method for aberration evaluation in a projection system2010
Illumination device for projection system and method for fabricating2008
Apparatus for aberration detection and measurement2008
Method of photomask correction and its optimization using localized frequency an2007
Method for aberration detection and measurement2006
Masks for use in optical lithography below 180 nm2006
Method of illuminating a photomask using chevron illumination2006
Optical proximity correction method utilizing gray bars as sub-resolution assist2005
Optical proximity correction method utilizing ruled ladder bars as sub-resolutio2005
Method of improving photomask geometry2005
Mask for projection photolithography at or below about 160 nm and a method there2004