Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8852850 | Method of photolithography using a fluid and a system thereof | — | 2014-10-07 |
| 7768648 | Method for aberration evaluation in a projection system | — | 2010-08-03 |
| RE40239 | Illumination device for projection system and method for fabricating | — | 2008-04-15 |
| 7345735 | Apparatus for aberration detection and measurement | — | 2008-03-18 |
| 7233887 | Method of photomask correction and its optimization using localized frequency analysis | — | 2007-06-19 |
| 7170588 | Reduction Smith-Talbot interferometer prism for micropatterning | — | 2007-01-30 |
| 7136143 | Method for aberration detection and measurement | — | 2006-11-14 |
| RE39349 | Masks for use in optical lithography below 180 nm | — | 2006-10-17 |
| 7092073 | Method of illuminating a photomask using chevron illumination | — | 2006-08-15 |
| 6934010 | Optical proximity correction method utilizing gray bars as sub-resolution assist features | — | 2005-08-23 |
| 6881523 | Optical proximity correction method utilizing ruled ladder bars as sub-resolution assist features | — | 2005-04-19 |
| 6846595 | Method of improving photomask geometry | — | 2005-01-25 |
| 6835505 | Mask for projection photolithography at or below about 160 nm and a method thereof | — | 2004-12-28 |
| 6821296 | Device for delivering a radioactive and/or drug dosage alone or in connection with a vascular stent | Richard Brauckman, Jack C. White | 2004-11-23 |
| 6791667 | Illumination device for projection system and method for fabricating | — | 2004-09-14 |
| 6788388 | Illumination device for projection system and method for fabricating | — | 2004-09-07 |
| 6556361 | Projection imaging system with a non-circular aperture and a method thereof | John S. Petersen | 2003-04-29 |
| 6541750 | Modification of a projection imaging system with a non-circular aperture and a method thereof | — | 2003-04-01 |
| 6531656 | Supply line alignment apparatus for supply column | James Grote, Thomas A. Stein, Thomas L. Ricks, Jay E. Fullenkamp, Donald E. Blanford +1 more | 2003-03-11 |
| 6525806 | Apparatus and method of image enhancement through spatial filtering | — | 2003-02-25 |
| 6480263 | Apparatus and method for phase shift photomasking | — | 2002-11-12 |
| 6466304 | Illumination device for projection system and method for fabricating | — | 2002-10-15 |
| 6395433 | Photomask for projection lithography at or below about 160 nm and a method thereof | — | 2002-05-28 |
| 6388736 | Imaging method using phase boundary masking with modified illumination | John S. Petersen | 2002-05-14 |
| 6368755 | Masks for use in optical lithography below 180 nm | — | 2002-04-09 |