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Home › Buried conductor patterns formed by surface transformation of empty spaces in solid state materials

Buried conductor patterns formed by surface transformation of empty spaces in solid state materials

US Patent 7164188 · Granted Jan 16, 2007

Estimated economic value: $2,988,000 ⓘ

Assignee

Micron

Inventors

Paul A. Farrar (216 patents)
Joseph E. Geusic (92 patents)

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