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Home › Computer-implemented method and carrier medium configured to generate a set of process parameters and/or a list of potential causes of deviations for a lithography process

Computer-implemented method and carrier medium configured to generate a set of process parameters and/or a list of potential causes of deviations for a lithography process

US Patent 7142941 · Granted Nov 28, 2006

Estimated economic value: $17,208,000 ⓘ

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