Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Box-shaped facing-targets sputtering apparatus and method for producing compound thin film

Box-shaped facing-targets sputtering apparatus and method for producing compound thin film

US Patent 7135097 · Granted Nov 14, 2006

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Facing-targets-type sputtering apparatus and method2005
Facing-targets-type sputtering apparatus2005
Facing-targets-type sputtering apparatus2005
Method for producing organic thin-film device by use of facing-targets-type sput2004
Facing target type sputtering apparatus2000
Magnetic head assembly for a flexible magnetic disk drive unit1992
Magnetic recording disk cartridge1990
Magnetic head assembly for a flexible magnetic disk drive unit1989
Perpendicular magnetic recording medium, method for producing the same, and sput1989
Method of producing a thin film by sputtering and an opposed target type sputter1988
Perpendicular magnetic recording medium, method for producing the same, and sput1987
Perpendicular magnetic recording medium method for producing the same, and sputt1986