Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7135097 | Box-shaped facing-targets sputtering apparatus and method for producing compound thin film | Sadao Kadokura | 2006-11-14 |
| 6881311 | Facing-targets-type sputtering apparatus | Sadao Kadokura | 2005-04-19 |