Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for capturing fault state data

Method and apparatus for capturing fault state data

US Patent 7098048 · Granted Aug 29, 2006

Estimated economic value: $13,087,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Associating data with workpieces and correlating the data with yield data2012
Method and apparatus for initializing tool controllers based on tool event data2006
Method and apparatus for updating control state variables of a process control m2005
Method and apparatus for controlling process target values based on manufacturin2005
Selecting control algorithms based on business rules2005
Method and apparatus for distinguishing between sources of process variation2005
Method and apparatus for integrating multiple process controllers2004
Method and apparatus for incorporating control simulation environment2004
Method and apparatus for adaptively scheduling tool maintenance2004
Method for prioritizing production lots based on grade estimates and output requ2004
Method and apparatus for controlling the flow of wafers through a process flow2004
Method for determining, tracking and/or controlling processing based upon silico2003