Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Stage system, exposure apparatus, and device manufacturing method

Stage system, exposure apparatus, and device manufacturing method

US Patent 6989888 · Granted Jan 24, 2006

Estimated economic value: $230,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Exposure apparatus2008
Static gas bearing system, stage mechanism, exposure apparatus, and device manuf2007
Substrate holding device, substrate processing apparatus using the same, and met2006
Exposure apparatus2006
Exposure apparatus2006
Exposure apparatus2006
Stage system, exposure apparatus, and device manufacturing method2006
Substrate processing apparatus2006
Electron beam exposure apparatus and semiconductor device manufacturing method2005
Substrate processing apparatus2005
Positioning device, exposure device, and device manufacturing method2002
Positioning system and position measuring method for use in exposure apparatus2001