Compositions for microlithography

Assignee

• E.I. Du Pont De Nemours And

Inventors

• Larry Berger (6 patents)
• Michael Karl Crawford (17 patents)
• Jerald Feldman (82 patents)
• Lynda Kaye Johnson (65 patents)
• Frank Leonard Schadt, III (42 patents)
• Fredrick Claus Zumsteg, Jr. (14 patents)

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