Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of recycling fluorine using an adsorption purification process

Method of recycling fluorine using an adsorption purification process

US Patent 6955707 · Granted Oct 18, 2005

Estimated economic value: $633,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Solution based precursors2014
Method for the recovery and re-use of process gases2010
Method of treating a gas stream2009
Method and apparatus for using solution based precursors for atomic layer deposi2009
Method and apparatus for producing a purified liquid2007
Methods for forming low-k dielectric films2005
Method and apparatus for producing a purified liquid2005
Thermal activation of fluorine for use in a semiconductor chamber2004
Process for the purification of nitric oxide2003
Valve for use with high purity gas2002
Apparatus and method for purifying boron trichloride by removal of phosgene2000
Apparatus and method for purifying boron trichloride by removal of phosgene2000