Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Automated wafer defect inspection system and a process of performing such inspection

Automated wafer defect inspection system and a process of performing such inspection

US Patent 6937753 · Granted Aug 30, 2005

Estimated economic value: $2,847,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Automated wafer defect inspection system and a process of performing such inspec2016
Automated wafer defect inspection system and a process of performing such inspec2016
Automated wafer defect inspection system and a process of performing such inspec2016
Automated wafer defect inspection system and a process of performing such inspec2016
Automated wafer defect inspection system and a process of performing such inspec2016
Automated wafer defect inspection system and a process of performing such inspec2016
Wafer holding mechanism2012
Adjustable film frame aligner2012
Edge inspection2010
Automated wafer defect inspection system and a process of performing such inspec2010
Automated wafer defect inspection system and a process of performing such inspec2010
Automated wafer defect inspection system and a process of performing such inspec2010