Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Systems and methods for multi-dimensional inspection and/or metrology of a specimen

Systems and methods for multi-dimensional inspection and/or metrology of a specimen

US Patent 6917421 · Granted Jul 12, 2005

Estimated economic value: $16,803,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

3D profilometry with a Linnik interferometer2025
Training a neural network for defect detection in low resolution images2020
Coordinate fusion and thickness calibration for semiconductor wafer edge inspect2014
Systems and methods for multi-dimensional metrology and/or inspection of a speci2006
Systems and methods for multi-dimensional metrology and/or inspection of a speci2006
Systems and methods for multi-dimensional metrology and/or inspection of a speci2006
Vertical fuse structure for integrated circuits and a method of disconnecting th2002
Method of making a reusable photolithography mask1999
Automatic photomask and reticle inspection method and apparatus including improv1989
Process and apparatus for in-situ qualification of master patterns used in patte1988
Photomask inspection apparatus and method using corner comparator defect detecti1985