Assignee
Inventors
- Shigekazu Kato (66 patents)
- Kouji Nishihata (73 patents)
- Tsunehiko Tsubone (95 patents)
- Atsushi Itou (87 patents)
{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Vacuum processing apparatus and operating method therefor", "item": "https://www.patentleaderboard.com/patent/6886272"}]}
Skip to contentUS Patent 6886272 · Granted May 3, 2005