Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing system and surface processing method

Plasma processing system and surface processing method

US Patent 6884318 · Granted Apr 26, 2005

Estimated economic value: $229,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Rod fixing apparatus for vertebra connecting member2011
Process for forming dielectric films2011
Electron source and image display apparatus2011
Rod connector2009
Rod connector2009
Surface modification method2005
Microwave applicator, plasma processing apparatus having same, and plasma proces2005
Laser oscillating apparatus, exposure apparatus using the same and device fabric2004
Laser oscillating apparatus, exposure apparatus, and device fabrication method2004
Laser oscillating apparatus with slotted waveguide2004
Plasma processing apparatus having permeable window covered with light shielding2004
Plasma processing apparatus having circular waveguide, and plasma processing met2003