Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method

Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method

US Patent 6862080 · Granted Mar 1, 2005

Estimated economic value: $208,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Exposure apparatus with tanks storing helium gas and method of manufacturing dev2009
Holding system, exposure apparatus, and device manufacturing method2007
Holding system, exposure apparatus, and device manufacturing method2007
Substrate holding device, semiconductor manufacturing apparatus and device manuf2006
Processing apparatus, measuring apparatus, and device manufacturing method2006
Substrate holding device, semiconductor manufacturing apparatus and device manuf2006
Electron beam exposure apparatus and semiconductor device manufacturing method2005
Processing apparatus with pressure control and gas recirculation system2003
Stage system and exposure apparatus with the same2002
Positioning stage system and position measuring method2002
Electron beam exposure apparatus2001
Electron beam exposure apparatus2000