Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for coupling a pellicle assembly to a photomask

Method and apparatus for coupling a pellicle assembly to a photomask

US Patent 6841312 · Granted Jan 11, 2005

Estimated economic value: $2,101,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for optimizing a pellicle for off-axis transmission of ligh2007
Photomask and method for manufacturing the same2006
Method and apparatus for coupling a pellicle to a photomask using a non-distorti2005
Damage resistant photomask construction2005
Photomask and method for forming an opaque border on the same2004
Multi-tone photomask and method for manufacturing the same2004
Alternating aperture phase shifting photomask with improved transmission balanci2004
Alternating aperture phase shifting photomask with improved intensity balancing2004
Method and apparatus for evaluating the runability of a photomask inspection too2004
Method and apparatus for evaluating the runability of a photomask inspection too2002
Photomask blanks1995
Photomask blanks comprising transmissive embedded phase shifter1995