Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Deep-UV anti-reflective resist compositions

Deep-UV anti-reflective resist compositions

US Patent 6824952 · Granted Nov 30, 2004

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Epoxy formulations and processes for fabrication of relief patterns on low surfa2025
Low temperature cure photoimageable dielectric compositions and methods of their2024
Photoimageable compositions and processes for fabrication of relief patterns on 2023
Polysulfonamide redistribution compositions and methods of their use2019
Simulation and verification system and method2018
Electroplating of metals on conductive oxide substrates2017
Oxidizing aqueous cleaner for the removal of post-etch residues2016
Metal and dielectric compatible sacrificial anti-reflective coating cleaning and2016
Photoresist removal2016
Light induced plating of metals on silicon photovoltaic cells2015
Metal and dielectric compatible sacrificial anti-reflective coating cleaning and2015
Oxidizing aqueous cleaner for the removal of post-etch residues2014