Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for chemical sensing using a microfabricated teeter-totter resonator

Method for chemical sensing using a microfabricated teeter-totter resonator

US Patent 6823720 · Granted Nov 30, 2004

Estimated economic value: $11,085,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma-based method for delayering of circuits2023
Air to liquid micro-fluidic chamber2023
Systems and methods for interferometric end point detection for a focused ion be2019
Lateral vias for connections to buried microconductors and methods thereof2019
Method for simultaneous modification of multiple semiconductor device features2019
Lateral vias for connections to buried microconductors2018
Folded passage gas chromatography column2014
MEMS packaging with etching and thinning of lid wafer to form lids and expose de2013
Die singulation method and package formed thereby2012
Tortuous path chemical preconcentrator2010
Modular manifold for integrated fluidics and electronics2010
Microelectromechanical safing and arming apparatus2008