Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate holder, and use of the substrate holder in a highly accurate measuring instrument

Substrate holder, and use of the substrate holder in a highly accurate measuring instrument

US Patent 6816253 · Granted Nov 9, 2004

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and device for qualifying a mask of a lithography system2025
Device and method for determining placements of pattern elements of a reflective2025
Method and apparatus for transforming measurement data of a photolithographic ma2022
Method for capturing and compensating ambient effects in a measuring microscope2020
Method for calibrating a position-measuring system and position-measuring system2016
Method for measuring a lithography mask or a mask blank2016
Substrate holder, and use of the substrate holder in a highly accurate measuring2006
Substrate holder, and use of the substrate holder in a highly accurate measuring2006
Contact sensor, and apparatus for protecting a protruding component2005
Coordinate measuring stage2005
Interferometric measurement apparatus for wavelength calibration2004
Coordinate measuring stage and coordinate measuring instrument2004