Method of etching metallic thin film on thin film resistor

Assignee

• Denso

Inventors

• Ichiro Ito (4 patents)
• Satoshi Shiraki (30 patents)
• Tomio Yamamoto (23 patents)
• Makoto Ohkawa (11 patents)
• Atsumi Takahashi (7 patents)
• Yasuaki Tsuzuki (6 patents)
• Akito Fukui (27 patents)
• Toshio Sakakibara (26 patents)
• Takayuki Sugisaka (10 patents)

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