Assignee
Inventors
- Tatsuya Sato (133 patents)
- Yuichiro Kato (25 patents)
- Kenji Mitomo (6 patents)
{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Apparatus and method for inspecting surface of semiconductor wafer or the like", "item": "https://www.patentleaderboard.com/patent/6798504"}]}
Skip to contentUS Patent 6798504 · Granted Sep 28, 2004