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Home › Unified apparatus and method to assure probe card-to-wafer parallelism in semiconductor automatic wafer test, probe card measurement systems, and probe card manufacturing

Unified apparatus and method to assure probe card-to-wafer parallelism in semiconductor automatic wafer test, probe card measurement systems, and probe card manufacturing

US Patent 6794889 · Granted Sep 21, 2004

Estimated economic value: $5,024,000 ⓘ

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