Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies

Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies

US Patent 6787055 · Granted Sep 7, 2004

Estimated economic value: $988,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Mounting apparatus for dynamically loaded structural joints2025
Suspended floor assembly2020
Methods for mechanical or chemical-mechanical planarization of microelectronic-d2007
Methods for mechanical or chemical-mechanical planarization of microelectronic-d2007
Method of making carrier head backing plate having low-friction coating2006
Method of making carrier head backing plate having low-friction coating2006
Carrier head having low-friction coating and planarizing machine using same2006
Carrier head having low-friction coating and planarizing machine using same2006
Polishing systems, methods of polishing substrates, and methods of cleaning poli2004
Polishing systems, methods of polishing substrates, and methods of preparing liq2004
Carrier heads, planarizing machines and methods for mechanical or chemical-mecha2003
Carrier heads, planarizing machines and methods for mechanical or chemical-mecha2003