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Home › Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies

Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies

US Patent 6627098 · Granted Sep 30, 2003

Estimated economic value: $3,105,000 ⓘ

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