Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas pulsing for etch profile control

Gas pulsing for etch profile control

US Patent 6784108 · Granted Aug 31, 2004

Estimated economic value: $1,044,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Digital platform for connecting insurance related transactions2025
Systems and methods for treating substrates with cryogenic fluid mixtures2022
Systems and methods for treating substrates with cryogenic fluid mixtures2020
Systems and methods for treating substrates with cryogenic fluid mixtures2018
Systems and methods for treating substrates with cryogenic fluid mixtures2018
Systems and methods for treating substrates with cryogenic fluid mixtures2018
Process for selectively removing nitride from substrates2015
Poultry cart handler and method2014
Multi piece burial vault base and method of making the same2011
Use of a plasma source to form a layer during the formation of a semiconductor d2010
Method of forming high aspect ratio apertures2009
Method of forming high aspect ratio apertures2009