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Home › Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile

Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile

US Patent 6768084 · Granted Jul 27, 2004

Estimated economic value: $5,764,000 ⓘ

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