Jeff P. Hebb

AT Axcelis Technologies: 1 patents #165 of 300Top 60%

📍 Boston, MA: #3,695 of 5,993 inventorsTop 65%

🗺 Massachusetts: #56,664 of 88,656 inventorsTop 65%

Overall (All Time): #3,485,461 of 4,157,543Top 85%

Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6768084	Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile	Yong Liu	2004-07-27