Magnetron plasma processing apparatus

Assignee

• Tokyo Electron Limited
• Shin-Etsu Chemical Co.

Inventors

• Tomomi Yamasaki (1 patents)
• Hidetoshi Kimura (50 patents)
• Junichi Arami (38 patents)
• Hiroo Ono (16 patents)
• Akira Koshiishi (66 patents)
• Koji Miyata (82 patents)

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