Surface inspection tool

Assignee

• IBM

Inventors

• Wayne Isami Imaino (81 patents)
• Anthony Juliana, Jr. (16 patents)
• Milton Russell Latta (22 patents)
• Charles H. Lee (19 patents)
• Wai Cheung Leung (18 patents)
• Hal J. Rosen (55 patents)
• Unknown
• Richard Sonningfeld (2 patents)

View full patent text on Google Patents →