Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of calibrating a wafer edge gripping end effector

Method of calibrating a wafer edge gripping end effector

US Patent 6678581 · Granted Jan 13, 2004

Estimated economic value: $6,851,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lighting apparatus for a motor vehicle and assembly of the components of the lig2024
Display2023
Three-dimensional folding frame, electric vehicle, bicycle, and motorcycle2023
Display apparatus2021
Keyboard circuit and method for keyboard circuit2015
Method of making and using alloy susceptor with improved properties for film dep2012
Remote hardware inspection system and method2011
Preventing dosage drift with duplicate dose integrators2009
Method for increasing polysilicon grain size2008
Optical wafer presence sensor system2005
Optical wafer presence sensor system2005
Chemical vapor deposition (CVD) calibration method providing enhanced uniformity2005