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Home › Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers

Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers

US Patent 6662657 · Granted Dec 16, 2003

Estimated economic value: $11,236,000 ⓘ

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